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Contamination Standards

Absolute Contamination Standards

  • Substrate Deposited Polystyrene Latex Spheres
  • For use with Scanning Surface Inspection Systems (SSIS)

Edge Contamination Standards

  • Edges of Substrate Deposited Polystyrene Latex Spheres
  • For use with Edge Contamination Detection Systems

Reticle Contamination Standards

  • Spheres deposited on photomasks / test plates
  • For use with reticle and pellicle inspection systems

Silica Contamination Standards

  • Substrate Deposited highly spherical Silica Spheres
  • For use with Advanced Scanning Surface Inspection Systems (SSIS)