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ARC-lite

ARC-lite is the world's first system to offer fast, reliable, room temperature AR coatings on package and wafer level devices. ARC-lite is used as a free-standing unit for AR coating polished backside surfaces. The sample produced are optimized and require no baking.

ARC-lite reaches maximum functionality when used with the ASAP-1 Selected Area Preparation System -- The ARC-lite sample mounting plate can be conveniently transferred between ARC-lite and ASAP-1.

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SP Series classic barrel reactors for isotropic etching, stripping and cleaning for various industries

Unique Specifications

  • Convenient loading and unloading of product via file cabinet chamber door
  • Optional temperature controlled shelf available
  • Many "special" material handlers and fixtures are stock items
  • Grounded shelf available for caging (down stream) apps
  • All models include 20 processes stored with multi-stepping (parameter change in different places in process)

Features

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BSET EQ Plaser™

With 15 years of plasma decap experience and 5 years of system development, we proudly present the BSET EQ Plaser

Because of new package technologies, it has become more challenging for failure analysis teams to decapsulate today’s semiconductor devices. Often, plasma is the only way to meet your decapsulation needs.

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NT Series Planar Electrode Batch Plasma Systems

NT Series vacuum chambers for plasma etching and cleaning for various industries worldwide

Unique Specifications

  • Ability to perform in direct, R.I.E. and downstream plasma modes without tooling change overs
  • Stainless steel chamber for high process cleanliness and system integrity
  • State of the art process controller geared for process development
  • Proprietary add ons & options
  • Available in stand alone or table top

Features

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