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Metrosol's patented VUV spectroscopic reflectometry (VUV SR) technology provides simultaneous thickness and composition measurement in production-worthy platforms - high precision and high throughput at a lower acquisition cost than current ultra-thin film tools. The suitability for on-product use combined with speed and robustness, make it well-suited for in-line or in-situ applications.

 

 

 

 

 

 

Metrosol VUV-7000 Metrology System

Metrosol provides the fastest, inline, small spot measurement solutions for fabs, equipment and materials suppliers, and wafer manufacturers worldwide. Applications include, but are not limited to:
 

 

Simultaneous Thickness & Composition for:
Semiconductor
SiON
HfO & other High-k
Metal Gate
Multilayer Dielectrics (SONOS, ONO, High-k Capacitor)
ARC
CMP Polish Rates & Tool Quals
STI Stacks
Damascene Stack
BARC Layer Thickness, n & k @ Lithographic Wavelength
Photoresist Track Quals
Etch to Clear
Etch Rate and Tool Quals

Data Storage
TMR Barrier
DLC Slider
DLC Media
Multilayer Laminate Films

NanoImprint
Residual Layer
Pattern Layer
Adhesion Layer
Material Properties