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Rapid Thermal Processing Systems
Modular Process Technology Corporation supplies advanced RTP Process solutions for Silicon, Compound Semiconductor, Integrated Photonics and MEMS device processing.
RTP-600S 150mm Desktop RTP System
Applications Include:
- Ti salicidation
- Nitridation of metals
- Silicides formation and annealing
- Silicon dielectric growth
- Glass reflow
- Polysilicon anneal
- Source/drain implant activation
- Contact alloying and tapering
- Trench oxidation
- TEOS spacer densification
- GaAs, Implant anneal
- GaAs contact alloying
RTP-800S 200mm RTP System
Other systems are available including Automated Systems, 300mm, etc.
Please contact us for additional information.