- 25, 45, 70 and 110 nm Line Width
- Used with SEMs and CD-AFMs
Nanolattice Standard (NLS)
The NanoLattice Module Standard (NLSM) is a CD SEM calibration standard which enables accurate sub 0.13 μm lithography. The NanoLattice has the 0.1 μm pitch required for sub 0.13 μm SEM magnification calibration and characterization of non-linearity across the field of view.